Integrated tilt angle sensing for large displacement scanning MEMS mirrors
نویسندگان
چکیده
منابع مشابه
Mems Based Xy Stage with Large Displacement
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and achieves a bi-directional displacement range greater than 225 μm per motion axis. The proposed XY stage design comprises four rigid stages (ground, motion stage, and two intermediate stages) interconnected via flexure modules. The motion stage, which has two translational degrees of freedom, is connected to...
متن کاملMEMS arrays for deformable mirrors
A new class of silicon-based deformable mirror for use in optical applications such as adaptive optical systems and optical correlators is being built. The mirror will be a massively parallel system of electrostatically-controlled, interconnected microactuators that can be coordinated to achieve precise actuation and control at a macroscopic level. The deformable mirror system described here wi...
متن کاملMEMS Deformable Mirrors for Astronomical Adaptive Optics
We report on the development of high actuator count, micro-electromechanical (MEMS) deformable mirrors designed for high order wavefront correction in ground and space-based astronomical adaptive optics instruments. The design of these polysilicon, surface-micromachined MEMS deformable mirrors builds on technology that has been used extensively to correct for ocular aberrations in retinal imagi...
متن کاملA MEMS Capacitive Microphone Modelling for Integrated Circuits
In this paper, a model for MEMS capacitive microphone is presented for integrated circuits. The microphone has a diaphragm thickness of 1 μm, 0.5 × 0.5 mm2 dimension, and an air gap of 1.0 μm. Using the analytical and simulation results, the important features of MEMS capacitive microphone such as pull-in voltage and sensitivity are obtained 3.8v and 6.916 mV/Pa, respectively while there is no...
متن کاملExploiting Mirrors for Laser Stripe 3D Scanning
This paper proposes and evaluates the use of a mirror for improving the scanning process when using laser-stripe acquisition devices. We propose to exploit mirrors for two different purposes: automatizing the 3D acquisition process and allowing the scanning of hard-to-reach parts. The combined use of a flat mirror and a rotary table allows to scan, in a completely automatic and unattended manne...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Optics Express
سال: 2018
ISSN: 1094-4087
DOI: 10.1364/oe.26.025736